Chin. Phys. B
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Chin. Phys. B  2017, Vol. 26 Issue (7): 078102    DOI: 10.1088/1674-1056/26/7/078102
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search |
Growth and characterization of AlN epilayers using pulsed metal organic chemical vapor deposition
Zesheng Ji(吉泽生)1, Lianshan Wang(汪连山)1,2, Guijuan Zhao(赵桂娟)1, Yulin Meng(孟钰淋)1, Fangzheng Li(李方政)1, Huijie Li(李辉杰)1, Shaoyan Yang(杨少延)1, Zhanguo Wang(王占国)1
1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

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