Chin. Phys. B
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Chin. Phys. B  2017, Vol. 26 Issue (6): 065207    DOI: 10.1088/1674-1056/26/6/065207
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search |
Effect of driving frequency on the structure of silicon grown on Ag (111) films by very-high-frequency magnetron sputtering
Jia-Min Guo(郭佳敏)1, Chao Ye(叶超)1,2, Xiang-Ying Wang(王响英)3, Pei-FangYang(杨培芳)1, Su Zhang(张苏)3
1 College of Physics, Optoelectronics and Energy, Soochow University, Suzhou 215006, China;
2 Key Laboratory of Thin Films of Jiangsu Province, Soochow University, Suzhou 215006, China;
3 Medical College, Soochow University, Suzhou 215123, China

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