Chin. Phys. B
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Chin. Phys. B  2017, Vol. 26 Issue (4): 047303    DOI: 10.1088/1674-1056/26/4/047303
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Etching mask optimization of InAs/GaSb superlattice mid-wavelength infared 640×512 focal plane array
Hong-Yue Hao(郝宏玥)1,2, Wei Xiang(向伟)1,2, Guo-Wei Wang(王国伟)1,2, Ying-Qiang Xu(徐应强)1,2, Xi Han(韩玺)1,2, Yao-Yao Sun(孙瑶耀)1,2, Dong-Wei Jiang(蒋洞微)1,2, Yu Zhang(张宇)1,2, Yong-Ping Liao(廖永平)1,2, Si-Hang Wei(魏思航)1,2, Zhi-Chuan Niu(牛智川)1,2
1 State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Synergetic Innovation Center of Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China

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