High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer

doi:10.1088/1674-1056/25/11/114213

Abstract A high-contrast grating (HCG) focusing reflector providing phase front control of reflected light and high reflectivity is proposed and fabricated. Basic design rules to engineer this category of structures are given in detail. A 1550 nm TM polarized incident light of 11.86 mm in focal length and 0.8320 in reflectivity is obtained in experiment. The wavelength dependence of the fabricated HCGs from 1530 nm to 1580 nm is also tested. The test results show that the focal length is in the range of 11.81-12 mm, which is close to the designed focal length of 15 mm. The reflectivity is almost above 0.56 within a bandwidth of 50 nm. At a distance of 11.86 mm, the light is focused to a round spot with the highest concentration, which is much smaller than the size of the incident beam. The FWHM of the reflected light beam decreases to 120 nm, and the intensity increases to 1.18.

Keywords: gratings reflectors polarization

Received: 07 April 2016
Revised: 20 July 2016
Accepted manuscript online:

PACS:	42.79.Dj	(Gratings)
	42.79.Fm	(Reflectors, beam splitters, and deflectors)
	42.68.Mj	(Scattering, polarization)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 61274044, 61574019 and 61020106007), the National Basic Research Program of China (Grant No. 2010CB327600), the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20130005130001), the Natural Science Foundation of Beijing, China (Grant No. 4132069), the Key International Science and Technology Cooperation Project of China (Grant No. 2011RR000100), the 111 Project of China (Grant No. B07005), and the Program for Changjiang Scholars and Innovative Research Team in Universities of China (Grant No. IRT0609).

Corresponding Authors: Yongqing Huang
E-mail: yqhuang@bupt.edu.cn

Cite this article:

Wenjing Fang(房文敬), Yongqing Huang(黄永清), Xiaofeng Duan(段晓峰), Kai Liu(刘凯), Jiarui Fei(费嘉瑞), Xiaomin Ren(任晓敏) High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer 2016 Chin. Phys. B 25 114213

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High-reflectivity high-contrast grating focusing reflector on silicon-on-insulator wafer

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