Chin. Phys. B
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Chin. Phys. B  2016, Vol. 25 Issue (10): 105206    DOI: 10.1088/1674-1056/25/10/105206
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search |
Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N2/Ar discharges
Ying-Shuang Liang(梁英爽), Yu-Ru Zhang(张钰如), You-Nian Wang(王友年)
School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

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