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Chin. Phys. B, 2016, Vol. 25(10): 104205    DOI: 10.1088/1674-1056/25/10/104205
ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS Prev   Next  

Effects of annealing time on the structure, morphology and stress of gold-chromium bilayer film

Hong Zhang(张洪)1,2, Yun-Xia Jin(晋云霞)2, Hu Wang(王虎)1,2, Fang-Yu Kong(孔钒宇)2, Hao-Peng Huang(黄昊鹏)1,2, Yun Cui(崔云)2
1 University of Chinese Academy of Sciences, Beijing 100049, China;
2 Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China
Abstract  In this work, a 200-nm-thick gold film with a 10-nm-thick chromium layer used as an adhesive layer is fabricated on fused silica by the electron beam evaporation method. The effects of annealing time at 300 ℃ on the structure, morphology and stress of the film are studied. We find that chromium could diffuse to the surface of the film by formatting a solid solution with gold during annealing. Meanwhile, chromium is oxidized on the surface and diffused downward along the grain grooves in the gold film. The various operant mechanisms that change the residual stresses of gold films for different annealing times are discussed.
Keywords:  gold-chromium film      film stress      diffusion  
Received:  10 March 2016      Revised:  03 May 2016      Accepted manuscript online: 
PACS:  42.79.Wc (Optical coatings)  
  68.35.Gy (Mechanical properties; surface strains)  
  68.35.Fx (Diffusion; interface formation)  
  42.70.Hj (Laser materials)  
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61405225).
Corresponding Authors:  Yun-Xia Jin     E-mail:  yxjin@siom.ac.cn

Cite this article: 

Hong Zhang(张洪), Yun-Xia Jin(晋云霞), Hu Wang(王虎), Fang-Yu Kong(孔钒宇), Hao-Peng Huang(黄昊鹏), Yun Cui(崔云) Effects of annealing time on the structure, morphology and stress of gold-chromium bilayer film 2016 Chin. Phys. B 25 104205

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