Chin. Phys. B
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Chin. Phys. B  2016, Vol. 25 Issue (9): 095204    DOI: 10.1088/1674-1056/25/9/095204
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search |
Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces
Jinghua Han(韩敬华)1, Li Luo(罗莉)1,2, Yubo Zhang(张玉波)3, Ruifeng Hu(胡锐峰)1, Guoying Feng(冯国英)1
1. College of Electronics and Information Engineering, Sichuan University, Chengdu 610064, China;
2. College of Optoelectronic technology, Chengdu University of Information Technology, Chengdu 610225, China;
3. Sichuan Engineering Technical College, Deyang 618000, China

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