A nano-scale mirror-like surface of Ti-6Al-4V attained by chemical mechanical polishing

doi:10.1088/1674-1056/25/5/058301

Abstract Metal Ti and its alloys have been widely utilized in the fields of aviation, medical science, and micro-electro-mechanical systems, for its excellent specific strength, resistance to corrosion, and biological compatibility. As the application of Ti moves to the micro or nano scale, however, traditional methods of planarization have shown their short slabs. Thus, we introduce the method of chemical mechanical polishing (CMP) to provide a new way for the nano-scale planarization method of Ti alloys. We obtain a mirror-like surface, whose flatness is of nano-scale, via the CMP method. We test the basic mechanical behavior of Ti-6Al-4V (Ti64) in the CMP process, and optimize the composition of CMP slurry. Furthermore, the possible reactions that may take place in the CMP process have been studied by electrochemical methods combined with x-ray photoelectron spectroscopy (XPS). An equivalent circuit has been built to interpret the dynamic of oxidation. Finally, a model has been established to explain the synergy of chemical and mechanical effects in the CMP of Ti-6Al-4V.

Keywords: chemical mechanical polishing titanium electrochemical x-ray photoelectron spectroscopy (XPS)

Received: 23 November 2015
Revised: 20 January 2016
Accepted manuscript online:

PACS:

83.50.Jf

(Extensional flow and combined shear and extension)

Fund: Project supported by the National Major Scientific and Technological Special Project during the Twelfth Five-year Plan Period of China (Grant No. 2009ZX02030-1), the National Natural Science Foundation of China (Grant No. 51205387), the Support by Science and Technology Commission of Shanghai City, China (Grant No. 11nm0500300), and the Science and Technology Commission of Shanghai City, China (Grant No. 14XD1425300).

Corresponding Authors: Weili Liu
E-mail: rabbitlwl@mail.sim.ac.cn

Cite this article:

Chenliang Liang(梁晨亮), Weili Liu(刘卫丽), Shasha Li(李沙沙), Hui Kong(孔慧), Zefang Zhang(张泽芳), Zhitang Song(宋志棠) A nano-scale mirror-like surface of Ti-6Al-4V attained by chemical mechanical polishing 2016 Chin. Phys. B 25 058301

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A nano-scale mirror-like surface of Ti-6Al-4V attained by chemical mechanical polishing

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