Chin. Phys. B
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Chin. Phys. B  2016, Vol. 25 Issue (5): 058106    DOI: 10.1088/1674-1056/25/5/058106
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search |
Influences of different structures on the characteristics of H2O-based and O3-based LaxAlyO films deposited by atomic layer deposition
Chen-Xi Fei(费晨曦), Hong-Xia Liu(刘红侠), Xing Wang(汪星), Dong-Dong Zhao(赵冬冬), Shu-Long Wang(王树龙), Shu-Peng Chen(陈树鹏)
Key Laboratory for Wide-Band Gap Semiconductor Materials and Devices of Education, School of Microelectronics, Xidian University, Xi'an 710071, China

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