High efficiency, large-active-area superconducting nanowire single-photon detectors

doi:10.1088/1674-1056/24/6/068501

Abstract

Niobium nitride superconducting nanowire single-photon detectors were fabricated on thermally oxidized silicon substrates with large active areas of 30 μm × 30 μm. To achieve non-constricted detectors, we improved the film growth and electron beam lithography process to fabricate uniform 100-nm wide NbN nanowires with a fill factor of 50%. The devices showed 72.4% system detection efficiency (SDE) at 100-Hz dark count rate (DCR) and 74-ps timing jitter, measured at the fiber communication wavelength of 1550 nm. The highest SDE which is 81.2% when the DCR is ～700 c/s appears at the wavelength of 1650 nm.

Keywords: single photon superconductor nanowire

Received: 03 January 2015
Revised: 24 March 2015
Accepted manuscript online:

PACS:	85.25.Pb	(Superconducting infrared, submillimeter and millimeter wave detectors)
	07.57.Kp	(Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors)
	85.60.Gz	(Photodetectors (including infrared and CCD detectors))

Corresponding Authors: Kang Lin
E-mail: kanglin@nju.edu.cn

About author: 85.25.Pb; 07.57.Kp; 85.60.Gz

Cite this article:

Gu Min (顾敏), Zhang La-Bao (张蜡宝), Kang Lin (康琳), Zhao Qing-Yuan (赵清源), Jia Tao (郏涛), Wan Chao (万超), Xu Rui-Ying (徐睿莹), Yang Xiao-Zhong (杨小忠), Wu Pei-Heng (吴培亨), Zhang Yong (张永), Xia Jin-Song (夏金松) High efficiency, large-active-area superconducting nanowire single-photon detectors 2015 Chin. Phys. B 24 068501

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High efficiency, large-active-area superconducting nanowire single-photon detectors

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