Development of MEMS-based micro capacitive tactile probe

doi:10.1088/1674-1056/23/11/118703

Abstract

In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine (NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.

Keywords: micro tactile probe micro capacitive sensor MEMS nano measuring machine

Received: 25 April 2014
Revised: 16 June 2014
Accepted manuscript online:

PACS:	87.85.Qr	(Nanotechnologies-design)
	87.85.Rs	(Nanotechnologies-applications)
	85.85.+j	(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
	87.85.Va	(Micromachining)

Fund:

Project supported by the Nano Special Projects of Shanghai Science and Technology Commission of China (Grant No. 11nm0560800) and the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 11104284).

Corresponding Authors: Fan Guo-Fang
E-mail: fanguofang@mail.ipc.ac.cn

Cite this article:

Lei Li-Hua (雷李华), Li Yuan (李源), Fan Guo-Fang (范国芳), Wu Jun-Jie (吴俊杰), Jian Li (简黎), Cai Xiao-Yu (蔡潇雨), Li Tong-Bao (李同保) Development of MEMS-based micro capacitive tactile probe 2014 Chin. Phys. B 23 118703

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