Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique

The symmetric deposition technique is often used to improve the uniformity of sculptured thin film (STF). In this paper, optical properties of STF with the columnar angles ± β are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence.