Chin. Phys. B
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Chin. Phys. B  2014, Vol. 23 Issue (5): 058105    DOI: 10.1088/1674-1056/23/5/058105
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Structural and electrical characterization of annealed Si1-xCx/SiC thin film prepared by magnetron sputtering
Huang Shi-Hua, Liu Jian
Physics Department, Zhejiang Normal University, Zhejiang 321004, China

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