Chin. Phys. B
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Chin. Phys. B  2014, Vol. 23 Issue (3): 037201    DOI: 10.1088/1674-1056/23/3/037201
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Residual compressive stress and intensity of infrared absorption of cubic BN films prepared by plasma enhanced chemical vapor deposition
Yang Hang-Shenga, Jin Pan-Pana, Xu Ya-Bob, Li Hai-Yangb
a State Key Laboratory of Silicon Materials, Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China;
b Department of Physics, Zhejiang University, Hangzhou 310027, China

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