Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming

doi:10.1088/1674-1056/22/11/117901

Abstract In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method (FEM). A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s^-1 to 1.1° s^-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk (ARW) is reduced from 2.19° h^-1/2 to 1.42° h^-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h^-1 to 25.4° h^-1.

Keywords: femtosecond laser trimming micro-electro-mechanical system (MEMS) gyroscope finite element method (FEM) simulation

Received: 03 June 2013
Revised: 02 July 2013
Accepted manuscript online:

PACS:	79.20.Eb	(Laser ablation)
	06.30.Gv	(Velocity, acceleration, and rotation)
	02.70.Dh	(Finite-element and Galerkin methods)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 61027007).

Corresponding Authors: Feng Li-Hui
E-mail: lihui.feng@bit.edu.cn

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Zhao Ke (赵克), Feng Li-Hui (冯立辉), Wang Qian-Qian (王茜蒨), Liu Ming-Zhi (刘明智), Wang Ben-Guo (王本国), Cui Fang (崔芳), Sun Yu-Nan (孙雨南) Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming 2013 Chin. Phys. B 22 117901

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Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming

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