Chin. Phys. B
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Chin. Phys. B  2013, Vol. 22 Issue (8): 087202    DOI: 10.1088/1674-1056/22/8/087202
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Investigation of chlorine-based etchants in wet and dry etching technology for an InP planar Gunn diode
Bai Yanga b, Jia Ruia, Wu De-Qia, Jin Zhia, Liu Xin-Yua, Lin Mei-Yub
a Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
b China Academy of Telecommunication Research of Ministry of Industry and Information Technology of the People's Republic of China (MIIT), Beijing 100191, China

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