Chin. Phys. B
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Chin. Phys. B  2013, Vol. 22 Issue (3): 036103    DOI: 10.1088/1674-1056/22/3/036103
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Radiation damage effects on power VDMOS devices with composite SiO2–Si3N4 films
Gao Bo, Liu Gang, Wang Li-Xin, Han Zheng-Sheng, Song Li-Mei, Zhang Yan-Fei, Teng Rui, Wu Hai-Zhou
Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

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