| PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES |
Prev
Next
|
|
|
Effect of pulsed bias on properties of ZrN/TiZrN films deposited by cathodic vacuum arc |
| Zhang Guo-Ping (张国平), Wang Xing-Quan (王兴权), Lü Guo-Hua (吕国华), Zhou Lan (周澜), Huang Jun (黄骏), Chen Wei (陈维), Yang Si-Ze (杨思泽) |
| Institute of Physics, Chinese Academy of Science, Beijing 100080, China |
|
|
|
|
Abstract ZrN/TiZrN multilayer are deposited by cathodic vacuum arc method with different substrate bias (from 0 to -800 V), using Ti and Zr plasma flows in residual N2 atmosphere, combined with ion bombardment of sample surfaces. The effect of pulsed bias on structure and properties of films is investigated. Microstructure of the coating is analyzed by X-ray diffraction (XRD), and scanning electron microscopy (SEM). Meanwhile, the nanohardness, Young's modulus, and scratch tests are performed. The experimental results show that the films exhibit a nanoscale multilayer structure consisting of TiZrN and ZrN phases. Solid solutions are formed for component TiZrN films. The dominant preferred orientation of TiZrN films is (111) and (220). At pulsed bias of -200 V, the nanohardness and the adhesion strength of ZrN/TiZrN multilayer reach a maximum of 38 GPa, and 78 N, respectively. The ZrN/TiZrN multilayer demonstrates an enhanced nanohardness compared with binary TiN and ZrN films deposited under equivalent conditions.
|
Received: 25 June 2012
Revised: 09 August 2012
Accepted manuscript online:
|
|
PACS:
|
52.77.-j
|
(Plasma applications)
|
| |
52.75.-d
|
(Plasma devices)
|
| |
61.82.Bg
|
(Metals and alloys)
|
|
| Fund: Project supported by the National Magnetic Confinement Fusion Science Program of China (Grant No.2009GB106004). |
Corresponding Authors:
Yang Si-Ze
E-mail: yangsz@aphy.iphy.ac.cn
|
Cite this article:
Zhang Guo-Ping (张国平), Wang Xing-Quan (王兴权), Lü Guo-Hua (吕国华), Zhou Lan (周澜), Huang Jun (黄骏), Chen Wei (陈维), Yang Si-Ze (杨思泽) Effect of pulsed bias on properties of ZrN/TiZrN films deposited by cathodic vacuum arc 2013 Chin. Phys. B 22 035204
|
| [1] |
Huang J H, Yang H C, Guo X J and Yu G P 2005 Surf. Coat. Technol. 195 204
|
| [2] |
Tung H M, Huang J H, Tsai D G, Ai C F and Yu G P 2009 Mater. Sci. Eng. A 500 104
|
| [3] |
Niu E W, Li L, Lü G H, Yang S Z and Yang X Z 2007 Mater. Sci. Eng. A 460 135
|
| [4] |
Heinrich S, Schirmer S, Hirsch D, Gerlach J W, Manova D, Assmann W and Mandl S 2008 Surf. Coat. Technol. 202 2310
|
| [5] |
Nose M, Zhou M, Honbo E, Yokota M and Saji S 2001 Surf. Coat. Technol. 142 211
|
| [6] |
Hodak S K, Seppanen T and Tungasmit S 2008 Solid State Phenom. 136 133
|
| [7] |
Purushotham K P, Ward L P, Brack N, Pigram P J, Evans P, Noorman H and Manory R R 2003 Wear. 254 589
|
| [8] |
Lugschedier E, Knotek O, Barimani C, Leyendcker T, Lemmer O and Wenke R 1999 Surf. Coat. Technol. 112 146
|
| [9] |
Kawata K, Sugimura H and Takai O 2001 Thin Solid Films. 390 64
|
| [10] |
PalDey S and Deevi S C 2003 Mater. Sci. Eng. A 342 58
|
| [11] |
Freller H and Hassler H 1988 Surf. Coat. Technol. 36 219
|
| [12] |
Ding X Z, Tay B K, Tan H S, Lau S P and Wong S P 2001 Surf. Coat. Technol. 138 301
|
| [13] |
Olbrich W, Fessmann J, Kampschulte G and Ebberink J 1991 Surf. Coat. Technol. 49 258
|
| [14] |
Fessmann J, Olbrich W, Kampschulte G and Ebberink J 1991 Mater. Sci. Eng. A 140 830
|
| [15] |
Oliver W C and Pharr G M 1998 J. Mater. Res. 13 1049
|
| [16] |
Boxman R L and Goldsmith S 1992 Surf. Coat. Technol. 52 39
|
| [17] |
Niu E W, Li L, Lü G H and Chen H 2007 Mater. Sci. Eng. A 460 135
|
| [18] |
Erturk E and Heuvel H J 1987 Thin Solid Films. 153 135
|
| [19] |
Niu E W, Li L, Lü G H and Chen H 2008 Appl. Surf. Sci. 254 3909
|
| [20] |
Wan X S, Zhao S S, Yang Y and Gong J 2010 Surf. Coat. Technol. 204 1800
|
| [21] |
Huang M, Lin G, Zhao Y and Sun C 2003 Surf. Coat. Technol. 176 109
|
| [22] |
Wu J J and Miller R J 1990 J. Appl. Phys. 67 1051
|
| [23] |
Melzer A and Trottenberg T 1994 Phys. Lett. A 191 301
|
| [24] |
Boxman R L and Goldsmith S S 1981 J. Appl. Phys. 52 151
|
| [25] |
Uglov V V, Anishchik V M and Khodasevich V V 2004 Surf. Coat. Technol. 180 519
|
| No Suggested Reading articles found! |
|
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
Altmetric
|
|
blogs
Facebook pages
Wikipedia page
Google+ users
|
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
View more on Altmetrics
|
|
|
