Chin. Phys. B
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Chin. Phys. B  2012, Vol. 21 Issue (10): 100702    DOI: 10.1088/1674-1056/21/10/100702
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Improvement of fabrication and characterization methods for micromechanical disk resonators
Zhao Hui, Luo Wei, Zheng Hai-Yang, Yang Jin-Ling, Yang Fu-Hua
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

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