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Improvement of fabrication and characterization methods for micromechanical disk resonators |
| Zhao Hui (赵晖), Luo Wei (骆伟), Zheng Hai-Yang (郑海洋), Yang Jin-Ling (杨晋玲), Yang Fu-Hua (杨富华) |
| Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
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Abstract In this paper we present a novel method to fabricate reliable micro-electro-mechanical system (MEMS) disk resonators with high yield and good performance. The key breakthrough in the fabrication process is a novel approach to effectively restraining electro-chemical corrosion of polycrystalline silicon (polysilicon) electrically coupled with noble metals of MEMS devices by hydrofluoric acid (HF)-based solutions. In addition, a measurement architecture based on a differential readout topology is demonstrated. The differential circuit proposed here can effectively suppress noise and feed-through current by common-mode rejection of the differential amplifier. This differential amplifier circuit configuration is also used to build up a notch filter. The preliminary result about the temperature dependence of the resonance frequency is discussed, and the device failure is analysed.
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Received: 08 March 2012
Revised: 11 April 2012
Accepted manuscript online:
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PACS:
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07.10.Cm
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(Micromechanical devices and systems)
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85.85.+j
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(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)
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| Fund: Project supported by the National Basic Research Program of China (Grant Nos. 2009CB320305 and 2011CB933102). |
Corresponding Authors:
Yang Jin-Ling
E-mail: jlyang@semi.ac.cn
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Cite this article:
Zhao Hui (赵晖), Luo Wei (骆伟), Zheng Hai-Yang (郑海洋), Yang Jin-Ling (杨晋玲), Yang Fu-Hua (杨富华) Improvement of fabrication and characterization methods for micromechanical disk resonators 2012 Chin. Phys. B 21 100702
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