The light-enhanced NO2 sensing properties of porous silicon gas sensors at room temperature

doi:10.1088/1674-1056/21/5/058201

Abstract The NO₂ gas sensing behavior of porous silicon (PS) is studied at room temperature with and without ultraviolet (UV) light radiation. The PS layer is fabricated by electrochemical etching in an HF-based solution on a p⁺-type silicon substrate. Then, Pt electrodes are deposited on the surface of the PS to obtain the PS gas sensor. The NO₂ sensing properties of the PS with different porosities are investigated under UV light radiation at room temperature. The measurement results show that the PS gas sensor has a much higher response sensitivity and faster response--recovery characteristics than NO₂ under the illumination. The sensitivity of the PS sample with the largest porosity to 1 ppm NO₂ is 9.9 with UV light radiation, while it is 2.4 without UV light radiation. We find that the ability to absorb UV light is enhanced with the increase in porosity. The PS sample with the highest porosity has a larger change than the other samples. Therefore, the effect of UV radiation on the NO₂ sensing properties of PS is closely related to the porosity.

Keywords: gas sensor ultraviolet radiation porous silicon porosity

Received: 10 October 2011
Revised: 27 April 2012
Accepted manuscript online:

PACS:	82.47.Rs	(Electrochemical sensors)
	73.61.Cw	(Elemental semiconductors)
	72.40.+w	(Photoconduction and photovoltaic effects)
	73.25.+i	(Surface conductivity and carrier phenomena)

Fund: Project supported by the National Natural Science Foundation of China (Grant Nos. 60771019 and 60801018) and the Tianjin Key Research Program of Application Foundation and Advanced Technology, China (Grant No. 11JCZDJC15300)

Cite this article:

Chen Hui-Qing(陈慧卿), Hu Ming(胡明), Zeng Jing(曾晶), and Wang Wei-Dan(王巍丹) The light-enhanced NO₂ sensing properties of porous silicon gas sensors at room temperature 2012 Chin. Phys. B 21 058201

[1]	Eranna G, Joshi B C, Runthala D P and Gupta R P 2004 Critical Reviews in Solid State and Materials Sciences 29 111
[2]	Rava M, Verlato G and Bono R 2007 Science of the Total Environment 384 163
[3]	Boarino L, Baratto C, Geobaldo F, Amato G, Comini E, Rossi A M, Faglia G, Lerondel G and Sberveglieri G 2000 Materials Science and Engineering B 69--70 210
[4]	Ozdemir S and Gole J L 2007 Current Opinion in Solid State and Materials Science 11 92
[5]	Sun F Y, Hu M, Sun P, Zhang J and Liu B 2010 J. Nanosci. Nanotechnol. 10 1
[6]	Barillaro G, Nannini A and Pieri F 2003 Sens. Actuators B 93 263
[7]	Xu L J, Hu M, Yang H B, Yang M L and Zhang J 2010 Acta Phys. Sin. 59 8794 (in Chinese)
[8]	Comini E, Faglia G and Sberveglieri G 2001 Sens. Actuators B 78 73
[9]	Anothainart K, Burgmair M, Karthigeyan A, Zimmer M and Eisele I 2003 Sens. Actuators B 93 580
[10]	Haridas D, Chowdhuri A, Sreenivas K and Gupta V 2011 Sens. Actuators B 153 152
[11]	Lacy C, Ewen R J, Ratcliffe N M and Richards M 2008 Sens. Actuators B 134 945
[12]	Zhai J L, Wang D J, Liang P, Lin Y H, Li X Y and Xie T F 2010 Sens. Actuators B 147 234
[13]	Yang M, Wang D, Liang P, Xie T F and Zhao Y 2006 Nanotechnology 17 4567
[14]	Yang T, Lin H, Wei B, Wu C and Lin C 2003 Rev. Adv. Mater. Sci. 4 48
[15]	Li S, Li F L, Zhou S M, Wang P, Cheng K and Du Z L 2009 Chin. Phys. B 18 3985
[16]	Hu M, Wang W D, Zeng J and Qin Y X 2011 Chin. Phys. B 20 102101
[17]	Liang P, Zhai J L, Wang D J, Zhang Y, Wang P, Zhao Q D and Xie T F 2010 Sens. Actuators B 66 148
[18]	Francia G Di and Citarella A 1995 J. Appl. Phys. 77 3549
[19]	Han C H, Hong D W, Han S D, Gwak J and Krishan C 2007 Sens. Actuator B 125 224
[20]	Yamazoe N 2005 Sens. Actuators B 108 2

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The light-enhanced NO₂ sensing properties of porous silicon gas sensors at room temperature