Fabrication and photoluminescence characteristics of In2O3 nanohillocks

doi:10.1088/1674-1056/20/11/118102

Abstract Uniformly distributed polycrystalline indium nanohillocks are synthesized on silicon substrates with Au catalyst by using the radio frequency magnetic sputtering technique. The results show that the Au catalyst plays a key role in the formation of indium nanohillocks. After thermally oxidizing the indium nanohillocks at 500 ℃ in air for 5 h, the indium nanohillocks totally transform into In₂O₃ nanohillocks. The energy-dispersive X-ray spectroscopy result indicates that many oxygen vacancies and oxygen-indium vacancy pairs exist in the In₂O₃ nanohillocks. Photoluminescence spectra under an Ne laser excitation at 280 nm show broad emissions at 420 nm and 470 nm with a shoulder at 450 nm related to oxygen vacancies and oxygen-indium vacancies at room temperature.

Keywords: In₂O₃ nanohillocks magnetron sputtering growth models low-dimensional alloy surface

Received: 27 July 2010
Revised: 29 June 2011
Accepted manuscript online:

PACS:	81.15.Cd	(Deposition by sputtering)
	68.55.-J
	78.55.-m	(Photoluminescence, properties and materials)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 10574047) and the Key Program of the National Natural Science Foundation of China (Grant No. 20490210).

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Wei He-Lin(魏合林), Zhang Lei(张磊), Liu Zu-Li(刘祖黎), and Yao Kai-Lun(姚凯伦) Fabrication and photoluminescence characteristics of In₂O₃ nanohillocks 2011 Chin. Phys. B 20 118102

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Fabrication and photoluminescence characteristics of In2O3 nanohillocks

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Fabrication and photoluminescence characteristics of In₂O₃ nanohillocks