InP-based evanescently coupled high-responsivity photodiodes with extremely low dark current density integrated diluted waveguide at 1550 nm

doi:10.1088/1674-1056/20/1/018504

Abstract In this paper, we have demonstrated a high performance waveguide photodiode integrated diluted waveguide serving as a fibre-to-waveguide coupler to achieve high coupling efficiency. High responsivity (> 1 A/W), high saturation power (> 45 mA) in the static state and extremely low dark current density (0.04 pA/μm²) with 3 dB bandwidth at 13.4 GHz have been achieved.

Keywords: high responsivity diluted waveguide evanescent coupling waveguide photodiode

Received: 20 January 2010
Revised: 08 March 2010
Accepted manuscript online:

PACS:	85.60.Dw	(Photodiodes; phototransistors; photoresistors)
	42.81.Qb	(Fiber waveguides, couplers, and arrays)
	73.40.Kp	(III-V semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)

Fund: Project supported by the National High Technology Research and Development Program of China (Grant No. 2006CB302802).

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Zuo Yu-Hua(左玉华),Cao Quan(曹权),Zhang Yun(张云), Zhang Ling-Zi(张岭梓), Guo Jian-Chuan(郭剑川),Xue Chun-Lai(薛春来),Cheng Bu-Wen(成步文),and Wang Qi-Ming(王启明) InP-based evanescently coupled high-responsivity photodiodes with extremely low dark current density integrated diluted waveguide at 1550 nm 2011 Chin. Phys. B 20 018504

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InP-based evanescently coupled high-responsivity photodiodes with extremely low dark current density integrated diluted waveguide at 1550 nm

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