Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

doi:10.1088/1674-1056/19/4/044210

Abstract This paper reports that SiO₂ is selected to fabricate broadband antireflection (AR) coatings on fused silica substrate by using glancing angle deposition and physical vapour deposition. Through accurate control of the graded index of the SiO₂ layer, transmittance of the graded broadband AR coating can achieve an average value of 98% across a spectral range of 300--1850 nm. Moreover, a laser-induced damage threshold measurement of the fabricated AR coating is performed by using a one-on-one protocol according to ISO11254-1, resulting in an average damage threshold of 17.2 J/cm$^{2}$.

Keywords: broadband antireflection coating graded index glancing angle deposition

Received: 24 November 2008
Revised: 06 July 2009
Accepted manuscript online:

PACS:	42.79.Wc	(Optical coatings)
	42.79.Ry	(Gradient-index (GRIN) devices)

Fund: Project supported by the National Natural Science Foundation of China (Grant No.~10804060), Higher Educational Science and Technology Program of Shandong Province of China (Grant No.~J08LI05).

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Kong Wei-Jin(孔伟金), Shen Zi-Cai(沈自才),Wang Shu-Hua(王淑华),Shao Jian-Da(邵建达), Fan Zheng-Xiu(范正修), and Lu Chao-Jing(卢朝靖) Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system 2010 Chin. Phys. B 19 044210

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Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

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