Transmittance investigation on capacitive mesh on thick dielectric substrates as output windows for optically pumped terahertz lasers

doi:10.1088/1674-1056/19/11/114202

Abstract This paper reports that an output window for optically pumped terahertz (THz) laser has been fabricated by depositing a capacitive nickel-mesh on a thick high-resistivity silicon substrate (approximating to 5 mm thick). Unlike the conventional process of depositing a gold film approximating to 100 nm on negative photoresist using electron-beam evaporation, a nickel film approximating to 1.5 μm thick is directly deposited on the clean surface of dielectric substrate using magnetron sputtering and then a positive photoresist is spun onto the nickel metal surface at 6000 r for 60 s. A transmittance spectrum of the output window in a certain frequency range (say, from zero to 1 THz) has been obtained by using THz time domain spectroscopy. Moreover a transmittance spectrum simulated numerically has also been estimated with respect to the output window using the transmission-line model (TLM) containing attenuation component from dielectric substrate. The simulation results show that the TLM can explain well the experimental curve in a certain frequency range from zero to 1 THz. Thus it is demonstrated that the improved optical component can be efficiently used as both output coupler and output window for optically pumped THz lasers.

Keywords: physical optics capacitive mesh structure output coupler optically pumped Terahertz laser

Received: 05 October 2009
Revised: 19 April 2010
Accepted manuscript online:

PACS:	07.57.-c	(Infrared, submillimeter wave, microwave and radiowave instruments and equipment)
	42.82.Cr	(Fabrication techniques; lithography, pattern transfer)
	42.82.Et	(Waveguides, couplers, and arrays)

Fund: Project supported by the Creative Foundation of Wuhan National Laboratory for Optoelectronics (Grant No. Z080007) and partly by the National Basic Research Program of China (973 Program)(Grant No. 61328).

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Qi Chun-Chao(祁春超), Zuo Du-Luo(左都罗), Lu Yan-Zhao(卢彦兆), Tang Jian(唐建), and Cheng Zu-Hai(程祖海) Transmittance investigation on capacitive mesh on thick dielectric substrates as output windows for optically pumped terahertz lasers 2010 Chin. Phys. B 19 114202

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Transmittance investigation on capacitive mesh on thick dielectric substrates as output windows for optically pumped terahertz lasers

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