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Fabrication and optical properties of MgxZn1-xO thin films |
| Zhang Xi-Jian(张锡健)a), Yuan Hui-Min(袁慧敏)b), Wang Qing-Pu(王卿璞)a)† , Wang Tong(王统)a), and Ma Hong-Lei(马洪磊) a) |
| a School of Physics, Shandong University, Jinan 250100, China; b Department of Physical Science and Technology, Shandong Institute of Education, Jinan 250013, China |
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Abstract Mg$_x$Zn$_{1 - x}$O ($x \le 0.3$) thin films have been prepared on silicon substrates by radio frequency magnetron sputtering at room temperature. The thin films have hexagonal wurtzite single-phase structure and a preferred orientation with the c-axis perpendicular to the substrates. The Mg content in the films is slightly larger than that in the targets. The refractive indices of Mg$_x$Zn$_{1 - x}$O films measured at room temperature by spectroscopic ellipsometry (SE) on the wavelength 632.8 nm are systematically decreased with the increasing of Mg content. Optical band gaps of Mg$_x$Zn$_{1 - x}$O films are determined by the transmittance spectra. With increasing Mg content, the absorption edges of Mg$_x$Zn$_{1 - x}$O films shift to higher energies and band gaps linearly increase from 3.24 eV at $x=0$ to 3.90 eV at $x =0.30$.
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Received: 10 June 2009
Revised: 29 June 2009
Accepted manuscript online:
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PACS:
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68.55.A-
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(Nucleation and growth)
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68.55.-a
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(Thin film structure and morphology)
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78.20.Ci
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(Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))
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78.66.Hf
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(II-VI semiconductors)
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81.15.Cd
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(Deposition by sputtering)
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| Fund: Project supported by the National
Found for Fostering Talents of Basic Science (NFFTBS) of China
(Grant No. J0730318)
and the Natural Science Foundation of Shandong Province, China (Grant No.
Y2007F02). |
Cite this article:
Zhang Xi-Jian(张锡健), Yuan Hui-Min(袁慧敏), Wang Qing-Pu(王卿璞), Wang Tong(王统), and Ma Hong-Lei(马洪磊) Fabrication and optical properties of MgxZn1-xO thin films 2010 Chin. Phys. B 19 018102
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| [1] |
Bazarov I V, Dunham B M, Liu X, Virgo M, Dabiran A M, Hannon F and Sayed H 2009 J. Appl. Phys. 105 083715
|
| [2] |
Tamboli A C, Hirai A, Nakamura S, DenBaars S P and Hu E L 2009 Appl. Phys. Lett. 94 151113
|
| [3] |
Li Y, Zheng R S, Feng Y C, Liu S H and Niu H B 2006 Chin. Phys. 15 702
|
| [4] |
Zhang Y, Du G, Liu D, Zhu H, Cui Y, Dong X and Yang S 2004 J. Cryst. Growth 268 140
|
| [5] |
He X B, Yang T Z, Cai J M, Zhang C D, Guo H M, Shi D X, Shen C M and Gao H J 2008 Chin. Phys. B 17 3444
|
| [6] |
Bagnall D M, Chen Y F, Zhu Z, Yao T, Koyama S, Shen M Y and Goto T 1997 Appl. Phys. Lett. 70 2230
|
| [7] |
Tang Z K, Wong G K L, Yu P, Kawasaki M, Ohtomo A, Koinuma H and Segawa Y 1998 Appl. Phys. Lett. 72 3270
|
| [8] |
Li X, Zhai F F, Liu Y, Cao M S, Wang F C and Zhang X X 2007 Chin. Phys. 16 2769
|
| [9] |
Ohtomo A, Kawasaki M, Ohkubo I, Koinuma H, Yasuda T and Segawa Y 1999 Appl. Phys. Lett. 75 980
|
| [10] |
Ohtomo A, Kawasaki M, Koida T, Masubuchi K, Koinuma H, Sakurai Y, Yoshida Y, Yasuda T and Segawa Y 1998 Appl. Phys. Lett. 72 2466
|
| [11] |
Sarver J F, Katnack F L and Hummel F A 1959 J. Electrochem. Soc. 106 960
|
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