Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laserand matched photopolymer

doi:10.1088/1674-1056/19/1/014218

Abstract 2D and 3D submicron periodic structures are first fabricated by red-induced photopolymerization using a common 635 nm semiconductor laser and specially developed red-sensitive polymer material. The principle of this new photo-polymer material fabrication is explained and the absorption spectra of the material are measured. This fabrication technique allows a deeper penetration into volume and larger interference irradiation area which is more than 1 cm². The optical design, theoretical calculations and experimental results including diffraction patterns verifying the formation of periodic structures are presented. Compared with other fabrication technologies using high-power lasers, this approach has greatly reduced the demand for laser apparatus. Therefore, it is much more accessible to most laboratories and potentially usable in holographic fabrication of photonic crystals and devices in micro electro-mechanical systems (MEMS).

Keywords: submicron periodic-structures holographic fabrication red sensitive polymer red-incuced polymerization

Received: 30 May 2009
Revised: 03 July 2009
Accepted manuscript online:

PACS:	42.70.Jk	(Polymers and organics)
	42.82.Cr	(Fabrication techniques; lithography, pattern transfer)
	81.05.Lg	(Polymers and plastics; rubber; synthetic and natural fibers; organometallic and organic materials)
	82.35.-x	(Polymers: properties; reactions; polymerization)
	82.50.-m	(Photochemistry)
	85.85.+j	(Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)

Fund: Projiect supported by the National Key Basic Research Special Fund of China (Grant No. 2004CB719805) and the Ningbo Natural Science Foundation, China (Grant No. 2009A610011).

Cite this article:

Zhu Teng-Fei(朱腾飞), Tan Bing-Hui(谭炳辉), Pan Xue-Feng(潘雪丰), and Tao Wei-Dong(陶卫东) Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laserand matched photopolymer 2010 Chin. Phys. B 19 014218

[1]	Yablonovitch E 1987 Phys. Rev. Lett. 58 2059
[2]	Campbell M, Sharp D N, Harrison M T, Denning R G and Turberfield A 2000 Nature 404 53
[3]	Feng T H, Dai Q F, Wu L J, Guo Q, Hu W and Lan S 2008 Chin. Phys. B 17 4533
[4]	Liu Z Q, Feng T H, Dai Q F, Wu L J and Lan S 2009 Chin. Phys. B 18 2383
[5]	Krauss T F and De La Rue R M 1999 Prog. Quantum Electron. 23 51
[6]	Yablonovitch E, Gmitter T J and Leung K M 1991 Phys. Rev. Lett. 67 2295
[7]	Noda S, Tomoda K, Yamamoto N and Chutinan A 2000 Science 289 604
[8]	Wijnhoven J E G J and Vos W L 1998 Science 281 802
[9]	Zakhidov A A, Baughman R H, Iqbal Z, Cui C, Khayrullin I, Dantas S O, Marti J and Ralchenko V G 1998 Science 282 897
[10]	Kondo T, Matsuo S, Juodkazis S and Misawa H 2001 Appl. Phys. Lett. 79 725
[11]	Wang X, Xu J F, Su H M, Zeng Z H, Chen Y L and Wang H Z 2003 Appl. Phys. Lett. 82 2212
[12]	Zhang H L, Wang Y H and Zhang G Y 2001 J. Optoelectronics Laser 12 754 (in Chinese)
[13]	Wang K M and Nie J 2009 J. Photochem. Photobiol. A: Chem. 204 7
[14]	Matsuo S, Kondo T, Juodkazis S, Mizeikis V and Misawa H 2002 SPIE Proc. 4655 327
[15]	Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis and Hiroaki Misawa 2006 Opt. Express 14 7943
[16]	Yang X L, Cai L Z and Liu Q 2003 Opt. Express 11 1050
[17]	Aschcroft N W and Mermin N D 1976 Solid State Physics (Philadelphia: Saunders College)

[1]	Molecular dynamics simulations of mechanical properties of epoxy-amine: Cross-linker type and degree of conversion effects Yongqin Zhang(张永钦), Hua Yang(杨华), Yaguang Sun(孙亚光),Xiangrui Zheng(郑香蕊), and Yafang Guo(郭雅芳). Chin. Phys. B, 2022, 31(6): 064209.
[2]	Recent progress in design of conductive polymers to improve the thermoelectric performance Zhen Xu (徐真), Hui Li (李慧), and Lidong Chen(陈立东). Chin. Phys. B, 2022, 31(2): 028203.
[3]	Polymer/silica hybrid waveguide Y-branch power splitter with loss compensation based on NaYF₄: Er³⁺, Yb³⁺ nanocrystals Yue-Wu Fu(符越吾), Tong-He Sun(孙潼鹤), Mei-Ling Zhang(张美玲), Xu-Cheng Zhang(张绪成), Fei Wang(王菲), Da-Ming Zhang(张大明). Chin. Phys. B, 2019, 28(10): 104206.
[4]	Influences on oxidation voltage and holding time on poly(3-methylthiophene) film for electrochromic stability Bo Zhang(张波), Chen Xu(徐晨), Guo-Yue Xu(徐国跃), Chu-Yang Liu(刘初阳), Hong-Han Bu(卜红寒), Jian-Chao Zhang(张建超). Chin. Phys. B, 2018, 27(12): 127802.
[5]	Polymer waveguide thermo-optical switch with loss compensation based on NaYF₄: 18% Yb³⁺, 2% Er³⁺ nanocrystals Gui-Chao Xing(邢桂超), Mei-Ling Zhang(张美玲), Tong-He Sun(孙潼鹤), Yue-Wu Fu(符越吾), Ya-Li Huang(黄雅莉), Jian Shao(邵健), Jing-Rong Liu(刘静蓉), Fei Wang(王菲), Da-Ming Zhang(张大明). Chin. Phys. B, 2018, 27(11): 114218.
[6]	All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing Yu Liu(刘豫), Yue Sun(孙月), Yun-Ji Yi(衣云骥), Liang Tian(田亮), Yue Cao(曹悦), Chang-Ming Chen(陈长鸣), Xiao-Qiang Sun(孙小强), Da-Ming Zhang(张大明). Chin. Phys. B, 2017, 26(12): 124215.
[7]	Optical nonlinearities of tetracarbonyl-chromium triphenyl phosphine complex M D Zidan, A W Allaf, A Allahham, A AL-Zier. Chin. Phys. B, 2017, 26(4): 044205.
[8]	Holographic storage of three-dimensional image and data using photopolymer and polymer dispersed liquid crystal films Hong-Yue Gao(高洪跃), Pan Liu(刘攀), Chao Zeng(曾超), Qiu-Xiang Yao(姚秋香), Zhiqiang Zheng(郑志强), Jicheng Liu(刘吉成), Huadong Zheng(郑华东), Ying-Jie Yu(于瀛洁), Zhen-Xiang Zeng(曾震湘), Tao Sun(孙涛). Chin. Phys. B, 2016, 25(9): 094205.
[9]	Flexible impedance and capacitive tensile load Sensor based on CNT composite Zubair Ahmad, Kh S Karimov, Farid Touati. Chin. Phys. B, 2016, 25(2): 028801.
[10]	Confinement-induced nanocrystal alignment of conjugated polymer by the soft-stamped nanoimprint lithography Li Xiao-Hui (李晓慧), Yu Ji-Cheng (俞计成), Lu Nai-Yan (陆乃彦), Zhang Wei-Dong (张卫东), Weng Yu-Yan (翁雨燕), Gu Zhen (顾臻). Chin. Phys. B, 2015, 24(10): 104215.
[11]	New method for fast morphological characterization of organic polycrystalline films by polarized optical microscopy He Xiao-Chuan (何小川), Yang Jian-Bing (杨建兵), Yan Dong-Hang (闫东航), Weng Yu-Xiang (翁羽翔). Chin. Phys. B, 2015, 24(7): 076803.
[12]	Novel pressure and displacement sensors based on carbon nanotubes Kh. S. Karimov, Khaulah Sulaiman, Zubair Ahmad, Khakim M. Akhmedov, A. Mateen. Chin. Phys. B, 2015, 24(1): 018801.
[13]	A simple encapsulation method for organic optoelectronic devices Sun Qian-Qian (孙倩倩), An Qiao-Shi (安桥石), Zhang Fu-Jun (张福俊). Chin. Phys. B, 2014, 23(8): 083302.
[14]	Influence of limestone fillers on combustion characteristics of asphalt mortar for pavements Wu Ke (吴珂), Zhu Kai (朱凯), Wu Hao (吴昊), Han Jun (韩君), Wang Jin-Chang (王金昌), Huang Zhi-Yi (黄志义), Liang Pei (梁培). Chin. Phys. B, 2014, 23(7): 074703.
[15]	A shortcut for determining growth mode R. A. Rehman, Cai Yi-Liang (蔡亦良), Zhang Han-Jie (张寒洁), Wu Ke (吴珂), Dou Wei-Dong (窦卫东), Li Hai-Yang (李海洋), He Pi-Mo (何丕模), Bao Shi-Ning (鲍世宁). Chin. Phys. B, 2013, 22(10): 107202.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laserand matched photopolymer

Cite this article:

Online attention