Positronium diffusion in porous methylsilsesquioxanethin films

doi:10.1088/1674-1056/19/1/013601

Abstract Depth profiled positronium (Ps) annihilation lifetime spectroscopy (PALS) is an extremely useful probe of the pore characteristics in nanoporous low-dielectric (low-k) constant thin films. PALS has also been considered as a potential probe to investigate diffusion barrier integrity and the structural changes of porous low-k films during their integration with Cu. Hence, it is essential to understand the diffusion behaviour of positronium/Cu atoms in the films. In this work, based on the fact that porous materials possess characteristics of statistical self-similarity, a fractal model, the Menger sponge model, has been applied to simulate the structure of a promising dielectric, porous methylsilsesquioxane (MSQ) films. The diffusion behaviour of Ps out of the fractal model and into the surrounding vacuum is studied by means of the diffusion equation and traditional advective--diffusive theory. Predictive results from our model show good agreement with measurement data.

Keywords: positronium porous methylsisesquioxane thin films low-k Menger sponge model

Received: 07 October 2008
Revised: 13 August 2009
Accepted manuscript online:

PACS:	78.70.Bj	(Positron annihilation)
	66.30.Ny	(Chemical interdiffusion; diffusion barriers)
	66.30.Pa	(Diffusion in nanoscale solids)
	77.22.Ch	(Permittivity (dielectric function))
	77.55.+f
	78.66.Qn	(Polymers; organic compounds)

Fund: Project supported by the National Natural Science Foundation of China (Grant No. 60476011).

Cite this article:

Dong Xi-Jie(董锡杰), Hu Yi-Fan(胡一帆), and Wu Yu-Ying(吴玉莹) Positronium diffusion in porous methylsilsesquioxanethin films 2010 Chin. Phys. B 19 013601

[1]	Takata M, Ogushi K, Yuba Y, Akasaka Y, Tomioka K, Soda E and Kobayashi 2008 Thin Solid Films 516 847
[2]	Seok S I, Ahn C H, Jin M Y, Lee C J and Kang Y 2004 Mater. Chem. Phys. 84 259
[3]	Ahner N, Schulz S E, Blaschta F and Rennau M 2007 Micro. Eng. 84 2606
[4]	Baklanov M R and Mogilnikov K P 2002 Microelectron. Eng. 64 335
[5]	Knights A P, Kowalski G, Saleh A S, Towner A, Patel M I, Rive-Evans P C, Moore M, Gledhill G A, Nossarzewska-Orlowska E and Brzozowski A 1995 J. Appl. Phys. 78 4411
[6]	Macchi C, Mariotto G, Karwasz G P, Zecca A, Bettonte M and Brusa R S 2004 Mat. Sci. Semicond. Process. 7 289
[7]	Dannefaer S, Wiebe C and Kerr D 2000 J. Porous Mater. 7 323
[8]	Dannefaer S, Kerr D, Craigen D, BretagnonT, Taliercio T and Foucaran A 1996 J. Appl. Phys. 79 9110
[9]	Nakano A, Bi L, Kalia R K and Vashishta P 1993 Phys. Rev. Lett. 71 85
[10]	Beckers J V L and de Leeuw S W 2001 Int. J. Inorg. Mater. 3 175
[11]	Katz A J and Thompson A H 1985 Phys. Rev. Lett. 54 132
[12]	Krohn C E and Thompson A E 1986 Phys. Rev. B 33 6366
[13]	Thovert J F, Wary F and Adler P M 1990 J. Appl. Phys. 68 3872
[14]	Adler P M 1996 J. Hydrology 187 195
[15]	Smidt J M and Monro D M 1998 Fractals 6 401
[16]	Yu B M, Lee L J and Cao H Q 2001 Fractals 9 155
[17]	Yu B M and Li J H 2001 Fractals 9 365
[18]	Yu B M and Cheng P 2002 Int. J. Heat Mass Transfer 45 2983
[19]	Yu B M, Lee L J and Cao H Q 2002 Polym. Compos. 23 201
[20]	Yu B M and Liu W 2004 AIChE J. 50 46
[21]	Alderborn G and Nystr?m C 1996 Pharmaceutical Powder Compaction Technology (New York: Marcel Dekker) p140
[22]	Feng Y J, Yu B M, Zou M Q and Zhang D M 2004 J. Phys.D 37 3030
[23]	Prado L A S De A, Radovanovic E, Pastore H O, Yoshida I V P and Torriani I L 2000 J. Polym. Sci. Part A: Polym. Chem. 38 1580
[24]	Yang S, Mirau P A, Pai C S, Nalamasu O, Reichmanis E, Pai J C, Obeng Y S, Seputro J, Lin E K, Lee H J, Sun J N and Gidley D W 2002 Chem. Mater. 14 369
[25]	Mezza P, Phalippou J and Sempere R 1999 J. Non-Cryst. Solids 243 75
[26]	Maex K, Baklanov M R, Shamiryan D, Iacopi F, Brongersma S H and Yanovitskaya Z S 2003 J. Appl. Phys. 93 8793
[27]	Petkov M P, Wang C L, Weber M H, Lynn K G and Rodbell K P 2003 J. Phys. Chem. B 107 2725
[28]	Gidley D W, Mayer R, Frieze W E and Lynn K G 1987 Phys. Rev. Lett. 58 595
[29]	He C, Hamada E, Suzuki T, Kumaki T, Kobayashi H, Kondo K and Ito Y 2004 Appl. Surf. Sci. 221 444
[30]	Zou X, Webb D P, Chan Y C, Lam Y W, Hu Y F, Gong M, Beling C D and Fung S 1998 J. Non-Cryst. Solids 227--230 105
[31]	Schultz P J and Lynn K G 1988 Rev. Mod. Phys. 60 701
[32]	Shantarovich V P and Goldanskii V I 1998 Hyperfine Interactions 116 67
[33]	Hu Y F, Sun J N and Gidley D W 2005 Chin. Phys. Lett. 22 1488
[34]	Webb S W and Pruess K 2003 Transport Porous Med. 51 327
[35]	Kong X Y 1999 Advanced Mechanics of Fluids in Porous Media (Hefei: Publishing House of University of Science and Tech nology of China) p19
[36]	Rosowsky A 2000 Europ. Phys. J. B 15 77

[1]	Plasma-screening effects on positronium formation Jia Ma(马佳), Yuan-Cheng Wang(王远成), Ya-Jun Zhou(周雅君), Heng Wang(王珩). Chin. Phys. B, 2018, 27(1): 013401.
[2]	Positronium formation for positron scattering from metastable hydrogen Lin Lin(林蔺), Hong-Nian Wang(汪宏年), Li-Guang Jiao(焦利光). Chin. Phys. B, 2017, 26(3): 033401.
[3]	Optical potential approach for positron scattering by metastable 2³S state of helium Xi-Gang Wu(吴锡刚), Yong-Jun Cheng(程勇军), Fang Liu(刘芳), Ya-Jun Zhou(周雅君). Chin. Phys. B, 2017, 26(2): 023401.
[4]	Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves Xiao Xia (肖夏), Tao Ye (陶冶), Sun Yuan (孙远). Chin. Phys. B, 2014, 23(10): 106803.
[5]	Coupled-channel optical calculation for positron–lithium scattering Liu Fang(刘芳), Cheng Yong-Jun(程勇军), and Zhou Ya-Jun(周雅君) . Chin. Phys. B, 2012, 21(5): 053403.
[6]	Unnatural parity resonance states in positron-excited hydrogen scattering Ma Jia (马佳), Zhou Ya-Jun (周雅君), Wang Yuan-Cheng (王远成). Chin. Phys. B, 2012, 21(12): 123403.

No Suggested Reading articles found!

Viewed

Full text

Abstract

Cited

Metrics
Related Articles

Positronium diffusion in porous methylsilsesquioxanethin films

Cite this article:

Online attention