Influence of the total gas flow rate on high rate growth microcrystalline silicon films and solar cells
Han Xiao-Yan(韩晓艳), Hou Guo-Fu(侯国付)†, Zhang Xiao-Dan(张晓丹), Wei Chang-Chun(魏长春), Li Gui-Jun(李贵君), Zhang De-Kun(张德坤), Chen Xin-Liang(陈新亮), Sun Jian(孙健), Zhang Jian-Jun(张建军), Zhao Ying(赵颖), and Geng Xin-Hua(耿新华)
Institute of Photoelectronics, Thin Film Devices and Technique of Nankai University, Tianjin 300071, China; Key Laboratory of Photoelectronics, Thin Film Devices and Technique of Tianjin, Tianjin 300071, China; Key Laboratory of Optoelectronic Information Science and Technology, Ministry of Education, Tianjin 300071, China
Abstract This paper reports that high-rate-deposition of microcrystalline silicon solar cells was performed by very-high-frequency plasma-enhanced chemical vapor deposition. These solar cells, whose intrinsic μc-Si:H layers were prepared by using a different total gas flow rate (Ftotal), behave much differently in performance, although their intrinsic layers have similar crystalline volume fraction, opto-electronic properties and a deposition rate of ～1.0 nm/s. The influence of Ftotal on the micro-structural properties was analyzed by Raman and Fourier transformed infrared measurements. The results showed that the vertical uniformity and the compact degree of μc-Si:H thin films were improved with increasing Ftotal. The variation of the microstructure was regarded as the main reason for the difference of the J--V parameters. Combined with optical emission spectroscopy, we found that the gas temperature plays an important role in determining the microstructure of thin films. With Ftotal of 300 sccm, a conversion efficiency of 8.11% has been obtained for the intrinsic layer deposited at 8.5 ?/s (1 ?= 0.1 nm).
Received: 22 August 2008
Revised: 05 November 2008
Accepted manuscript online:
Fund: Project supported by the National
Basic Research Program of China (Grant Nos 2006CB202602 and
2006CB202603), the Tianjin Assistant Foundation for the National
Basic Research Program of China (Grant No 07QTPTJC29500), and the
Natural
Science Foundation of Tianjin (Grant No 07JCYBJC04000).
Cite this article:
Han Xiao-Yan(韩晓艳), Hou Guo-Fu(侯国付), Zhang Xiao-Dan(张晓丹), Wei Chang-Chun(魏长春), Li Gui-Jun(李贵君), Zhang De-Kun(张德坤), Chen Xin-Liang(陈新亮), Sun Jian(孙健), Zhang Jian-Jun(张建军), Zhao Ying(赵颖), and Geng Xin-Hua(耿新华) Influence of the total gas flow rate on high rate growth microcrystalline silicon films and solar cells 2009 Chin. Phys. B 18 3563
A silazane additive for CsPbI2Br perovskite solar cells Ruiqi Cao(曹瑞琪), Yaochang Yue(乐耀昌), Hong Zhang(张弘), Qian Cheng(程倩), Boxin Wang(王博欣), Shilin Li(李世麟), Yuan Zhang(张渊), Shuhong Li(李书宏), and Huiqiong Zhou(周惠琼). Chin. Phys. B, 2022, 31(11): 110101.
No Suggested Reading articles found!
Viewed
Full text
Abstract
Cited
Altmetric
blogs
tweeters
Facebook pages
Wikipedia page
Google+ users
Online attention
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
