Chin. Phys. B
Citation Search Quick Search
Chin. Phys. B  2008, Vol. 17 Issue (9): 3428-3432    DOI: 10.1088/1674-1056/17/9/047
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Simulation of plasma doping process by using the localized molecular dynamics method
Yu Mina, Ren Li-Minga, Zhang Xinga, Huang Rua, Ji Hui-Huib, Zhang You-Guangc
a Department of Microelectronics, Peking University, Beijing 100871, China; b Department of Microelectronics, Peking University, Beijing 100871, China;School of Electronic and Information Engineering, Beihang University, Beijing 100083, China; c School of Electronic and Information Engineering, Beihang University, Beijing 100083, China

Copyright © the Chinese Physical Society
Address: Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China(100190)
Tel: 010-82649026   Fax: 010-82649027   E-Mail: cpb@aphy.iphy.ac.cn
Supported by Beijing Magtech Co. Ltd. Tel: 86-010-62662699 E-mail: support@magtech.com.cn