Simulation solution for micro droplet impingementon a flat dry surface
Sun Zhen-Hai(孙震海)a)b)c)† and Han Rui-Jing(韩瑞津)b)
aShanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; bGrace Semiconductor Manufacture Corporation, Shanghai 201203, China; bGraduate School of Chinese Academy of Sciences, Beijing 100039, China
Abstract This paper presents a computational fluid dynamics approach for micro droplet impacting on a flat dry surface. A two-phase flow approach is employed using FLUENT VOF multiphase model to calculate the flow distributions upon impact. The contact line velocity is tracked to calculate the dynamic contact angle through user defined function program. The study showed that the treatment of contact line velocity is crucial for the accurate prediction of droplet impacting on poor wettability surfaces. On the other hand, it has much less influence on the simulation of droplet impacting on good wettability surfaces. Good fit between simulation results and experimental data is obtained using this model.
Received: 19 December 2007
Revised: 15 February 2008
Accepted manuscript online:
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