Chin. Phys. B
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Chin. Phys. B  2008, Vol. 17 Issue (9): 3185-3188    DOI: 10.1088/1674-1056/17/9/005
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Simulation solution for micro droplet impingementon a flat dry surface
Han Rui-Jinga, Sun Zhen-Haib
a Grace Semiconductor Manufacture Corporation, Shanghai 201203, China; b Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;Grace Semiconductor Manufacture Corporation, Shanghai 201203, China;Graduate School of Chinese Academy of Sciences, Beijing 100039, China

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