Compositional and structural evolution of the titanium dioxide formation by thermal oxidation
Su Wei-Feng(苏卫锋)a), Gnaser Hubert b)c), Fan Yong-Liang(樊永良)a), Jiang Zui-Min(蒋最敏)a), and Le Yong-Kang(乐永康)a)c)†
a Surface Physics Laboratory, Department of Physics, Fudan University, Shanghai 200433, China; b Department of Physics, University of Kaiserslautern, D-67663 Kaiserslautern, Germany; c IFOS, University of Kaiserslautern, D-67663 Kaiserslautern, Germany
Abstract Titanium oxide films were prepared by annealing DC magnetron sputtered titanium films in an oxygen ambient. X-ray diffraction (XRD), Auger electron spectroscopy (AES) sputter profiling, MCs$^{ + }$-mode secondary ion mass spectrometry (MCs$^{ + }$-SIMS) and atomic force microscopy (AFM) were employed, respectively, for the structural, compositional and morphological characterization of the obtained films. For temperatures below 875 K, titanium films could not be fully oxidized within one hour. Above that temperature, the completely oxidized films were found to be rutile in structure. Detailed studies on the oxidation process at 925 K were carried out for the understanding of the underlying mechanism of titanium dioxide (TiO$_{2})$ formation by thermal oxidation. It was demonstrated that the formation of crystalline TiO$_{2}$ could be divided into a short oxidation stage, followed by crystal forming stage. Relevance of this recognition was further discussed.
Received: 20 November 2007
Revised: 21 December 2007
Accepted manuscript online:
(Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization)
Cite this article:
Su Wei-Feng(苏卫锋), Gnaser Hubert , Fan Yong-Liang(樊永良), Jiang Zui-Min(蒋最敏), and Le Yong-Kang(乐永康) Compositional and structural evolution of the titanium dioxide formation by thermal oxidation 2008 Chin. Phys. B 17 3003
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