Chin. Phys. B
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Chin. Phys. B  2008, Vol. 17 Issue (7): 2499-2503    DOI: 10.1088/1674-1056/17/7/025
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The theoretic analysis of maskless surface plasmon resonant interference lithography by prism coupling
Luo Xian-Ganga, Du Chun-Leia, Fang Liangb, Du Jing-Leib, Guo Xiao-Weib, Wang Jing-Quanb, Zhang Zhi-Youb
a Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China; b Physics Department, Sichuan University, Chengdu 610064, China

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