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Chinese Physics, 2007, Vol. 16(9): 2798-2802    DOI: 10.1088/1009-1963/16/9/050
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

Role of atomic transverse migration in growth of diamond-like carbon films

Ma Tian-Bao(马天宝), Hu Yuan-Zhong(胡元中), and Wang Hui(王慧)
The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
Abstract  The growth of diamond-like carbon (DLC) films is studied using molecular dynamics simulations. The effect of impact angle on film structure is carefully studied, which shows that the transverse migration of the incident atoms is the main channel of film relaxation. A transverse-migration-induced film relaxation model is presented to elucidate the process of film relaxation which advances the original model of subplantation. The process of DLC film growth on a rough surface is also investigated, as well as the evolution of microstructure and surface morphology of the film. A preferential-to-homogeneous growth mode and a smoothing of the film are observed, which are due to the transverse migration of the incident atoms.
Keywords:  diamond-like carbon      molecular dynamics  
Received:  09 November 2006      Revised:  09 January 2007      Accepted manuscript online: 
PACS:  68.55.A- (Nucleation and growth)  
  68.35.B- (Structure of clean surfaces (and surface reconstruction))  
  68.55.-a (Thin film structure and morphology)  
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos~50390060 and 50675111) and the State Key Development Program for Basic Research of China (Grant No~2003CB716201).

Cite this article: 

Ma Tian-Bao(马天宝), Hu Yuan-Zhong(胡元中), and Wang Hui(王慧) Role of atomic transverse migration in growth of diamond-like carbon films 2007 Chinese Physics 16 2798

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