Chin. Phys. B
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Chin. Phys.  2007, Vol. 16 Issue (8): 2455-2461    DOI: 10.1088/1009-1963/16/8/050
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Dopant diffusion and surface morphology of vanadium implanted 4H-silicon carbide
Wang Chao, Zhang Yi-Men, Zhang Yu-Ming, Ma Ge-Lin, Guo Hui, Xu Da-Qing
Institute of Microelectronics, Xidian University,Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, Xi'an 710071, China

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