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Chinese Physics, 2007, Vol. 16(7): 2116-2119    DOI: 10.1088/1009-1963/16/7/053
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Prev   Next  

A novel implantable multichannel silicon-based microelectrode

Sui Xiao-Hong(隋晓红), Zhang Ruo-Xin(张若昕), Pei Wei-Hua(裴为华), and Chen Hong-Da(陈弘达)
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083, China
Abstract  Silicon-based microelectrodes have been confirmed to be helpful in neural prostheses. The fabricated 7-channel silicon-based microelectrode was feasible to be implanted into the brain cortex. The manufacturing process by micro-electromechanical system (MEMS) technology was detailed with four photolithographic masks. The microscopic photographs and SEM images indicated that the probe shank was 3mm long, 100$\mu$m wide and 20$\mu$ m thick with the recording sites spaced 120$\mu$ m apart for good signal isolation. To facilitate the insertion and minimize the trauma, the microelectrode is narrowed down gradually near the tip with the tip taper angle of 6 degrees. Curve of the single recording site impedance versus frequency was shown by test in vitro and the impedance declined from 150.5k$\Omega$  to 6.0k$\Omega$  with frequency changing from 10 k to 10MHz.
Keywords:  MEMS      extracellular recording      microelectrode  
Received:  12 June 2006      Revised:  13 November 2006      Accepted manuscript online: 
PACS:  87.80.Fe (Micromanipulation of biological structures)  
  85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)  
  87.19.L- (Neuroscience)  
  87.19.R- (Mechanical and electrical properties of tissues and organs)  
  87.85.Va (Micromachining)  
Fund: Project supported by the National High Technology Research and Development Program of China (Grant No 2005AA311030) and the National Natural Science Foundation of China (Grant No 60536030).

Cite this article: 

Sui Xiao-Hong(隋晓红), Zhang Ruo-Xin(张若昕), Pei Wei-Hua(裴为华), and Chen Hong-Da(陈弘达) A novel implantable multichannel silicon-based microelectrode 2007 Chinese Physics 16 2116

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