Chin. Phys. B
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Chin. Phys.  2007, Vol. 16 Issue (3): 848-853    DOI: 10.1088/1009-1963/16/3/049
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Characterization of doped hydrogenated nanocrystalline silicon films prepared by plasma enhanced chemical vapour deposition
Wang Jin-Liang, Wu Er-Xing
Department of Physics, School of Science, Beihang University, Beijing 100083, China

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