Large area planar plasma sustained by surface microwave
Liang Bo(梁波)a), Ou Qiong-Rong(欧琼荣)b), Liang Yi-Zi(梁以资)a), and Liang Rong-Qing(梁荣庆) a)†
a The Key Laboratory of Applied Ion Beam Physics, the Ministry of Education, Shanghai 200433, China; b Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China
Abstract In this paper, we show theoretically and experimentally that the large-area planar plasma with high density and good uniformity can be sustained by a surface microwave when the electron density is over-dense. From the experimental results we find that the nonuniformities in azimuthal plasma density and electron temperature have been greatly improved and in particular the nonuniformity is less than 10% when the gas pressure is 30 Pa. By improving the antenna shape, enhancing the microwave power and choosing the appropriate gas pressure, the large area planar plasma with high density can be produced.
Accepted manuscript online:
PACS:
52.40.Fd
(Plasma interactions with antennas; plasma-filled waveguides)
Fund: Project supported by Prof. Liu Wang-Dong's research
project (Grant No~5131502).
Cite this article:
Liang Bo(梁波), Ou Qiong-Rong(欧琼荣), Liang Yi-Zi(梁以资), and Liang Rong-Qing(梁荣庆) Large area planar plasma sustained by surface microwave 2007 Chinese Physics 16 3732
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