a Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France; b School of Science, Beijing University of Astronautics and Aeronautics, Beijing 100083, Chinac Centre de Recherches sur la Matière Divisée – UMR 6619 CNRS – Université d'Orléans, 1B rue de la Férollerie, 45071 Orléans, Cedex 2, France
Abstract Pure W and W--Cu--W trilayer coatings were deposited on an Fe substrate by d.c. magnetron sputtering. The $\alpha -\beta$ phase evolution, intragranular stress evolution in sputter-deposited W layer were investigated by x-ray diffraction. They are directly related to the film microstructure, density and adhesion. Therefore, control of the film stress and phase component transition is essential for its applications. The phase component transition from $\beta$-W to $\alpha $-W and intragranular stress evolution from tensile to compressive strongly depend on the deposition parameters and can be induced by lowering Ar pressure and rising target power. The compressively stressed films with $\alpha $-W phase have a dense microstructure and high adhesion to Fe substrate.
Received: 26 May 2005
Revised: 07 November 2005
Accepted manuscript online:
Wang Cong (王聪), Pascal Brault, Alain Pineau, Pascale Plantin, Anne-Lise Thomann X-ray diffraction study of effect of deposition conditions on $\alpha-\beta$ phase transition and stress evolution in sputter-deposited W coatings 2006 Chinese Physics 15 432
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