New aspects of HCI test for ultra-short channel n-MOSFET devices
Ma Xiao-Hua(马晓华)a)b)†, Hao Yue(郝跃)a)b), Wang Jian-Ping(王剑屏)c), Cao Yan-Rong(曹艳荣)a)b), and Chen Hai-Feng(陈海峰)a)b)
a Microelectronics Institute, Xidian University, Xi'an 710071, China; b Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices,Xidian University, Xi'an 710071, China; c Logic Technology Development Center, SMIC, Shanghai 201203, China
Abstract Hot carriers injection (HCI) tests for ultra-short channel n-MOSFET devices were studied. The experimental data of short channel devices (75--90 nm), which does not fit formal degradation power law well, will bring severe error in lifetime prediction. This phenomenon usually happens under high drain voltage ($V_{\rm d}$) stress condition. A new model was presented to fit the degradation curve better. It was observed that the peak of the substrate current under low drain voltage stress cannot be found in ultra-short channel device. Devices with different channel lengths were studied under different $V_{\rm d}$ stresses in order to understand the relations between peak of substrate current ($I_{\rm sub}$) and channel length/stress voltage.
Received: 12 April 2006
Revised: 22 June 2006
Accepted manuscript online:
(Semiconductor-device characterization, design, and modeling)
Fund: Project supported by the National Natural Science Foundation of China (Grant No 60376024).
Cite this article:
Ma Xiao-Hua(马晓华), Hao Yue(郝跃), Wang Jian-Ping(王剑屏), Cao Yan-Rong(曹艳荣), and Chen Hai-Feng(陈海峰) New aspects of HCI test for ultra-short channel n-MOSFET devices 2006 Chinese Physics 15 2742
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
