Chin. Phys. B
Citation Search Quick Search
Chin. Phys.  2006, Vol. 15 Issue (11): 2713-2717    DOI: 10.1088/1009-1963/15/11/042
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Optical emission spectroscopy study on depositionprocess of microcrystalline silicon
Wu Zhi-Menga, Lei Qing-Songa, Xi Jian-Pinga, Geng Xin-Huab, Zhao Yingb, Sun Jianb
a Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China; b Institute of Optoelectronics, Nankai University, Tianjin 300071, China

Copyright © the Chinese Physical Society
Address: Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China(100190)
Tel: 010-82649026   Fax: 010-82649027   E-Mail: cpb@aphy.iphy.ac.cn
Supported by Beijing Magtech Co. Ltd. Tel: 86-010-62662699 E-mail: support@magtech.com.cn