Abstract This paper reports that DLC (diamond like carbon)/Ti and DLC films were prepared by using pulsed laser arc deposition. R-ray diffraction, Auger electron spectroscopy, Raman spectroscopy, atomic force microscopy, nanoindenter, spectroscopic ellipsometer, surface profiler and micro-tribometer were employed to study the structure and tribological properties of DLC/Ti and DLC films. The results show that DLC/Ti film, with $I(D)/I(G)$ 0.28 and corresponding to 76%sp$^{3}$ content calculated by Raman spectroscopy, uniform chemical composition along depth direction, 98 at%content of carbon, hardness 8.2 GPa and Young's modulus 110.5 GPa, compressive stress 6.579 GPa, thickness 46~nm, coefficient of friction 0.08, and critical load 95mN, exhibits excellent mechanical and tribological properties.
Received: 05 January 2006
Revised: 11 May 2006
Accepted manuscript online:
Fund: roject supported by the
National Key Basic Research Program of China (Grant No 2003CB716201)
and the National Natural Science Foundation of China (Grant
No~50575121) and Electro--Mechanic Technology Advancing Foundation of
NSK Ltd of Japan.
Cite this article:
Zhang Zhen-Yu(张振宇), Lu Xin-Chun(路新春), Luo Jian-Bin(雒建斌), Shao Tian-Min(劭天敏), Qing Tao(卿涛), and Zhang Chen-Hui(张晨辉) Preparation and tribological properties of DLC/Ti filmby pulsed laser arc deposition 2006 Chinese Physics 15 2697
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