Three-dimensional micro- and nanometre composite aluminium patterns
Zhao Xiao-Wei (赵小伟)a, Jiang Peng (江鹏)b, Gao Yan (高燕)a, Wang Jian-Xiong (王健雄)a, Song Li (宋礼)a, Liu Dong-Fang (刘东方)a, Liu Li-Feng (刘利峰)a, Dou Xin-Yuan (窦新元)a, Luo Shu-Dong (罗述东)a, Zhang Zeng-Xing (张增星)a, Xiang Yan-Juan (向彦娟)a, Zhou Wei-Ya (周维亚)a, Wang Gang (王刚)a
a Center for Condensed Matter Physics, Institute of Physics,Chinese Academy of Sciences, Beijing 100080, China; b National Center for Nanoscience and Technology (NCNST), Beijing 100080, China
Abstract Three-dimensional micro- and nanometre composite aluminium patterns are constructed on Al substrate by using photolithography, reactive ion etching and anodization. A layer of patterned SiO$_{2}$ mask is introduced as resist on the surface of Al foil, and during anodization the tilted nanopores and remaining Al microstructure are formed underneath the SiO$_{2}$ mask. The existence of SiO$_{2}$ mask leads to the deflection of electric field and effect on the transportation of ions, which results in the formation of laterally tilted nanopores, while the nanopores go down directly when being far from the boundaries of SiO$_{2}$. The vertical and lateral anodization processes proceeding simultaneously construct the Al microstructure under the patterned SiO$_{2}$ mask.
Received: 20 January 2005
Revised: 18 March 2005
Accepted manuscript online:
Fund: Project supported by the National Natural Science Foundation of China (Grant No G1999064592) and the State Key Programme of Basic Research of China (Grant No G1999064592).
Cite this article:
Zhao Xiao-Wei (赵小伟), Jiang Peng (江鹏), Gao Yan (高燕), Wang Jian-Xiong (王健雄), Song Li (宋礼), Liu Dong-Fang (刘东方), Liu Li-Feng (刘利峰), Dou Xin-Yuan (窦新元), Luo Shu-Dong (罗述东), Zhang Zeng-Xing (张增星), Xiang Yan-Juan (向彦娟), Zhou Wei-Ya (周维亚), Wang Gang (王刚) Three-dimensional micro- and nanometre composite aluminium patterns 2005 Chinese Physics 14 1471
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
