Optical properties of SrTiO3 thin films prepared by metalorganic decomposition
Ma Jian-Hua (马建华)a, Meng Xiang-Jian (孟祥建)ab, Sun Jing-Lan (孙璟兰)a, Lin Tie (林铁)a, Shi Fu-Wen (石富文)a, Chu Jun-Hao (褚君浩)a
a National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China; b State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China
Abstract SrTiO3 thin films were deposited on vitreous silica substrates by metalorganic decomposition (MOD). The films are polycrystalline cubic in structure with the lattice constants of a=0.39nm. Their optical constants (refractive index n and extinction coefficient k) were calculated by the envelope method from the transmittance spectra in the wavelength range of 190nm to 1100nm. The refractive index of the present films is found to be higher than that of the other SrTiO3 films prepared by RF sputtering, sol—gel and chemical vapour deposition. The dispersion of the refractive index in the films follows the single electronic oscillator model with oscillator strength (S0) of 0.88×1014m-2 and oscillator energy (E0
Received: 08 September 2004
Revised: 12 October 2004
Accepted manuscript online:
(Liquid phase epitaxy; deposition from liquid phases (melts, solutions, And surface layers on liquids))
Fund: Project supported by the National Natural Science Foundation of China (Grant Nos 60221502 and 60223006) and Shanghai R&D Foundation for Applied Materials (Grant No 0316).
Cite this article:
Ma Jian-Hua (马建华), Meng Xiang-Jian (孟祥建), Sun Jing-Lan (孙璟兰), Lin Tie (林铁), Shi Fu-Wen (石富文), Chu Jun-Hao (褚君浩) Optical properties of SrTiO3 thin films prepared by metalorganic decomposition 2005 Chinese Physics 14 610
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