Extraction of optical constants and thickness of nanometre scale TiO2 film
Yang Ying-Ge (杨莺歌), Liu Pi-Jun (刘丕均), Wang Ying (王英), Zhang Ya-Fei (张亚非)
National Key Laboratory of Nano/Micro Fabrication Technology, Bio-X DNA Computer Consortium, Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China
Abstract TiO$_{2}$ thin films were deposited on glass substrates by sputtering in a conventional rf magnetron sputtering system. X-ray diffraction pattern and transmission spectrum were measured. The curves of refraction index and extinction coefficient distributions as well as the thickness of films calculated from transmission spectrum were obtained. The optimization problem was also solved using a method based on a constrained nonlinear programming algorithm.
Received: 04 March 2005
Revised: 28 July 2005
Accepted manuscript online:
Fund: Project supported by Shanghai Municipal Commission for Science and Technology (Grant No 03DZ14025) and National Basic Research Program of China (Grant No 2006CB300406).
Cite this article:
Yang Ying-Ge (杨莺歌), Liu Pi-Jun (刘丕均), Wang Ying (王英), Zhang Ya-Fei (张亚非) Extraction of optical constants and thickness of nanometre scale TiO2 film 2005 Chinese Physics 14 2335
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
