Chin. Phys. B
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Chin. Phys.  2004, Vol. 13 Issue (8): 1370-1374    DOI: 10.1088/1009-1963/13/8/034
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Fabrication of high growth rate solar-cell-quality μc-Si:H thin films by VHF-PECVD
Zhang Xiao-Dan, Zhao Ying, Zhu Feng, Sun Jian, Wei Chang-Chun, Hou Guo-Fu, Geng Xin-Hua, Xiong Shao-Zhen
Institute of Optoelectronics, Nankai University, Tianjin 300071, China

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