Chin. Phys. B
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Chin. Phys.  2004, Vol. 13 Issue (5): 731-736    DOI: 10.1088/1009-1963/13/5/027
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Current Issue| Next Issue| Archive| Adv Search |
Upgrading design of the 3B1A beamline for x-ray nanometre lithography of microelectronic devices at BSRF
Yi Fu-Tinga, Peng Liang-Qianga, Zhang Ju-Fanga, Han Yonga, Ye Tian-Chunb, Chen Da-Pengb
a Institute of High Energy Physics, China Academy of Science, Beijing 100039, China; b Institute of Micro Electronics, China Academy of Science, Beijing 100029, China

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