PHOTO- AND ELECTRO-LUMINESCENCE FROM HYDROGENATED AMORPHOUS SILICON CARBIDE FILMS PREPARED BY USING ORGANIC CARBON SOURCE
Xu Jun (徐骏)a, Ma Tian-fu (马天夫)a, Li Wei (李伟)a, Chen Kun-ji (陈坤基)a, Li Zhi-feng (李志锋)b, Lu Wei (陆卫)b
a State Key Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China; b State Key Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
Abstract Hydrogenated amorphous silicon carbide (a-SiC:H) films were grown by using an organic source, xylene (C8H10), instead of methane (CH4) in a conventional plasma enhanced chemical vapor deposition system. The optical band gap of these samples was increased gradually by changing the gas ratio of C8H10 to SiH4. The film with high optical band gap was soft and polymer-like and intense photoluminescence were obtained. Room temperature electro-luminescence was also achieved with peak energy at 2.05 eV (600 nm) for the a-SiC:H film with optical band gap of 3.2 eV.
Received: 05 December 1999
Revised: 10 January 2000
Accepted manuscript online:
Fund: Project supported by the National Natural Science Foundation of China (Grant No. 59802004) and by the Natural Science Foundation of Jiangsu Province, China (Grant No. BK99047).
Cite this article:
Xu Jun (徐骏), Ma Tian-fu (马天夫), Li Wei (李伟), Chen Kun-ji(陈坤基), Li Zhi-feng(李志锋), Lu Wei (陆卫) PHOTO- AND ELECTRO-LUMINESCENCE FROM HYDROGENATED AMORPHOUS SILICON CARBIDE FILMS PREPARED BY USING ORGANIC CARBON SOURCE 2000 Chinese Physics 9 442
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