THE DISTRIBUTION OF Sb ATOMS IN $\delta$-DOPED SILICON CRYSTAL
Jia Quan-jie (贾全杰)a, Zheng Wen-li (郑文莉)a, Wang Zhou-guang (王洲光)a, Wang Jun (王俊)a, Jiang Xiao-ming (姜晓明)a, Jiang Zui-min (蒋最敏)b, Pei Cheng-wen (裴成文)b, Qin Jie (秦捷)b, Hu Dong-zhi (胡冬枝)b
a Institute of High Energy Physics, Academia Sinica, Beijing 100039, China; b State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China
Abstract The distribution of Sb atoms in $\delta$-doped silicon crystals grown by molecular beam epitaxy at different temperatures was measured using the technique of synchrotron radiation X-ray low angle reflection. The esults indicate that the doped Sb atoms are distributed exponentially in the epitaxial layers, and the 1/e decay lengths are 0.45, 0.95 and 3.5 nm for the samples grown at temperatures of 250, 300 and 350℃, respectively. For samples grown at 400℃, the 1/e decay length of the Sb atomic distribution increases drastically because of the segregation of Sb atoms during the growth process.
Received: 07 October 1997
Revised: 16 April 1998
Accepted manuscript online:
PACS:
68.55.Ln
(Defects and impurities: doping, implantation, distribution, concentration, etc.)
(Molecular, atomic, ion, and chemical beam epitaxy)
Fund: Project supported by the National Natural Science Foundation of China under the Grant No. 19674058.
Cite this article:
Jia Quan-jie (贾全杰), Zheng Wen-li (郑文莉), Wang Zhou-guang (王洲光), Wang Jun (王俊), Jiang Xiao-ming (姜晓明), Jiang Zui-min (蒋最敏), Pei Cheng-wen (裴成文), Qin Jie (秦捷), Hu Dong-zhi (胡冬枝) THE DISTRIBUTION OF Sb ATOMS IN $\delta$-DOPED SILICON CRYSTAL 1998 Acta Physica Sinica (Overseas Edition) 7 695
Altmetric calculates a score based on the online attention an article receives. Each coloured thread in the circle represents a different type of online attention. The number in the centre is the Altmetric score. Social media and mainstream news media are the main sources that calculate the score. Reference managers such as Mendeley are also tracked but do not contribute to the score. Older articles often score higher because they have had more time to get noticed. To account for this, Altmetric has included the context data for other articles of a similar age.
