Chin. Phys. B
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Acta Phys. Sin. (Overseas Edition)  1998, Vol. 7 Issue (12): 930-935    DOI: 10.1088/1004-423X/7/12/008
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PROPERITES OF HYDROGENATED AMORPHOUS SILICON CARBIDE FILMS IRRADIATED BY EXCIMER PULSE LASER
WANG LI, MA TIAN-FU, HUANG XIN-FAN, XU JUN, LI QI-LIANG, WU ZHUANG-CHUN, CHEN KUN-JI
State Key Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Nanjing 210093, China