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Acta Physica Sinica (Overseas Edition), 1997, Vol. 6(7): 517-521    DOI: 10.1088/1004-423X/6/7/006
CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES Prev   Next  

NUCLEATION ENHANCEMENT OF DIAMOND FILMS BY ION BOMBARDING AND ELECTRON EMITTING EFFECTS

WANG WAN-LU (王万录)a, LIAO KE-JUN (廖克俊)a, ZHANG ZHEN-GANG (张振刚)b, LIAO MEI-YONG (廖梅勇)b, M.C.POLOc, G.SANCHEZc, J.ESTEVEc
a Department of Applied Physics, Chongqing University, Chongqing 630044, China; 
b Department of Physics, Lanzhou University, Lanzhou 730001, China;
c Department de Fisica Aplicada Electronica, Universitat de Barcelona, Barcelona, Spain; 
Abstract  Applying a proper negative bias-voltage onto the substrate, on which diamond lilm is deposited by chemical vapor deposition technique, can greatly improve the nucleation density. While nucle-ation enhancing, both the ion bombardment and electron emission may play an important role sepa-rately. However, for the highest nucleation density, both of the two effects must act together.
Received:  25 October 1996      Accepted manuscript online: 
PACS:  68.55.A- (Nucleation and growth)  
  81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))  
  79.20.Kz (Other electron-impact emission phenomena)  
Fund: Project supported by the National Natural Science Foundation of China.

Cite this article: 

WANG WAN-LU (王万录), LIAO KE-JUN (廖克俊), ZHANG ZHEN-GANG (张振刚), LIAO MEI-YONG (廖梅勇), M.C.POLO, G.SANCHEZ, J.ESTEVE NUCLEATION ENHANCEMENT OF DIAMOND FILMS BY ION BOMBARDING AND ELECTRON EMITTING EFFECTS 1997 Acta Physica Sinica (Overseas Edition) 6 517

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